Thermal Evaporator

Located in the Semiconductor Physics Laboratory in the research block, the HHV vacuum box coater is a versatile unit both for research with facilities for thermal evaporation, substrate heating, substrate rotation, film thickness monitoring etc. BC-300 thermal evaporator is equipped with a dry scroll pump (nXDS20i, Edwards), a turbo molecular pump (TURBOVAC 600, Leybold), source shutter and substrate shutters. This system is customized and automated to deposit thin films of organic semiconductor, metal oxides and metal with a very fine control of deposition rate.